FAU is the coordinator of the project, due to their experience in large collaborative project management, and key expertise in utilising ALD as the central tool for generating functional surfaces and interfaces of oxide and chalcogenide semiconductors, noble metal catalysts, dielectrics and magnetic materials.
Research in the Prof. Julien Bachmann group focuses on the development of preparative methods for nanostructured inorganic materials and interfaces at which various types of energy conversion phenomena can be studied. We create inorganic nanostructures with accurately tunable geometry, and we study their physical and chemical properties systematically as they vary with the geometric parameters.
ATLANT 3D Nanosystems is a Danish deep-tech company that develops game-changing hybrid atomic layer processing technology for on-demand advanced manufacturing of micro-/nanodevices with atomic precision – ATLANT3D technology. Its multi-step production processes combined with a range of 450+ materials benefit rapid material and microelectronics development, previously considered impossible. An interdisciplinary team leads ATLANT with expertise in micro-/ nanofabrication, chemical processes, hardware development, project management, entrepreneurship, fundraising, finances, and sales & marketing. They already have one office and two labs located at DTU and FAU campus with access to state-of-the-art R&D resources.
Femtika is a spin off company from Vilnius University Laser Research Center established in 2013 by team of experts with portfolio of many years of research and development of 3D laser precision micro processing. Company specializes in hybrid microfabrication technologies: universal tool using femtosecond laser - Laser Nanofactory workstation for multiphoton polymerization, laser ablation, selective laser etching technologies. Also Femtika offers research services in this field. Company is targeting to supply the growing worldwide demands of available tools and technologies, enabling true 3D laser fabrication of custom design components in micro- and sub-micro scale. Microstructures provided by Femtika are used in development of new future products in semiconductors, photonics, medical, automotive, space industries and etc.
SEMPA is a leading manufacturer of high purity gas supply systems with well-developed safe and highly controlled industrial systems for leading global semiconductor companies. SEMPA designs and develops systems with a high quality and safety to ensure reliable work of the system in highly demanding industrial conditions. This project will engage their expertise in the development of the gas delivering system. SEMPA LAB is truly unique in the industry. It enables testing novel precursor chemical, before it enters production. This greatly mitigates risk and leads to optimised handling procedures and safest design. SEMPA production is certified according to ISO 9001:2015 and serves global customer base from their head quarter in Dresden, and trading partners around the world.
Institute of Electrical Engineering Slovak Academy of Sciences (IEE SAS) is a leading scientific institution founded in 1953. Research areas of the institute cover disciplines of electronic and electrical engineering and solid-state physics supported by extensive material research. Our researchers implement international projects supported by European Commission (H2020, ERDF), and national projects supported by APVV and VEGA agencies. SAS is the second academic partner – fifth in total – and are pioneering research in technologies that at nanoscale incorporates preparation of thin films using ALD and liquid injection MOCVD, activities in 2D materials, theoretical and experimental study of resistive switching in dielectrics, and effects in nanomagnets including magnetic field imaging.