THE ATOPLOT PROJECT

Vision

The vision of ATOPLOT consortium is to boost the innovativeness and competitiveness of a broad range of European and global high-tech industries by disrupting the prototyping of micro & nanostructures through the introduction of additive manufacturing on an atomic scale for functional devices.

Unprecedented functionality

Heading

Selective printing

Deposit what you need exactly where you ned it

Multistack printing

Excellent conformal deposition up to 6 gas precursors

Complex surfaces

Bypass lithography-imposed limitations

Unprecedented benefits

Up to 97% reduction in prototyping cost

- Standalone machine instead of 10-20
- Localized controlled ambient
- 10x less specialized expertise required
- Higher material efficiency and low waste
- Secure IP
- Simple integration into existing infrastructure

10x faster than traditional fabrication methods

- Rapid micro/nano prototyping
- Efficient prototyping with low risks
- Simple optimization procedure
- All in one system
- Plug & Play system

More flexibility
and possibilities

- Immediate functionality with rapid prototyping
- Versatile material printing
- New geometries and
- Hybrid processing with additive (bottom up) and subtractive (top down) and approaches

Why now?

The micro & nanofabrication sector is continuously looking for solutions able to comply and enable prototyping and manufacturing novel More than Moore devices and technologies with enhanced functionality, significantly cost reduction and development time. Moreover, this sector is looking for more flexible, efficient and sustainable solutions, able to utilize a broader range of materials permitting custom-built components and at same time reducing the amount of waste materials and energy demand.

Printing results

We successfully developed our system prototype and proved it to work just within a year. So far we tested several standard ALD processes such as for TiO2 (TTIP and H2O at 150°C) and Platinum (MeCpPtMe3 and O3 at 225°C) printing. Our system uses a spatial ALD mode that allows printing layers with 100 nm/min transverse and 4mm/s lateral speed. We have already printed simple and complex patterns within a few minutes, while conventional methods take several days.
We presented our results at the ALD/ALE 2020 conference, under the ALD for Manufacturing section A2324: AM-TuA4 An Atomic-Layer 3D Printer and we are finishing a manuscript for publication in Nature.

Applications

MEMS

Sensors

Optics

Photonics

RF devices

Solar cells

Partners complementarity

Printer assembly and printing service

Project management ALD process development and material characterisation

Qualification of the deposited material device conception and validation

Printer assembly and printing service

Project management ALD process development and material characterisation

Safe and stable precursor and gas delivery system

Printer assembly and printing service

Project management ALD process development and material characterisation

Safe and stable precursor and gas delivery system

Gantt diagram

Printhead and micronozzle

Gas system

Automation

Material testing and development

Demonstrators

Communication and dissemination