The vision of ATOPLOT consortium is to boost the innovativeness and competitiveness of a broad range of European and global high-tech industries by disrupting the prototyping of micro & nanostructures through the introduction of additive manufacturing on an atomic scale for functional devices.
Deposit what you need exactly where you ned it
Excellent conformal deposition up to 6 gas precursors
Bypass lithography-imposed limitations
- Standalone machine instead of 10-20
- Localized controlled ambient
- 10x less specialized expertise required
- Higher material efficiency and low waste
- Secure IP
- Simple integration into existing infrastructure
- Rapid micro/nano prototyping
- Efficient prototyping with low risks
- Simple optimization procedure
- All in one system
- Plug & Play system
- Immediate functionality with rapid prototyping
- Versatile material printing
- New geometries and
- Hybrid processing with additive (bottom up) and subtractive (top down) and approaches
The micro & nanofabrication sector is continuously looking for solutions able to comply and enable prototyping and manufacturing novel More than Moore devices and technologies with enhanced functionality, significantly cost reduction and development time. Moreover, this sector is looking for more flexible, efficient and sustainable solutions, able to utilize a broader range of materials permitting custom-built components and at same time reducing the amount of waste materials and energy demand.
We successfully developed our system prototype and proved it to work just within a year. So far we tested several standard ALD processes such as for TiO2 (TTIP and H2O at 150°C) and Platinum (MeCpPtMe3 and O3 at 225°C) printing. Our system uses a spatial ALD mode that allows printing layers with 100 nm/min transverse and 4mm/s lateral speed. We have already printed simple and complex patterns within a few minutes, while conventional methods take several days.
We presented our results at the ALD/ALE 2020 conference, under the ALD for Manufacturing section A2324: AM-TuA4 An Atomic-Layer 3D Printer and we are finishing a manuscript for publication in Nature.
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